Abstract: This paper analyzes the characteristics of distributed Micro Electromechanical System (MEMS) and studies components of MEMS based on multi-agent technology. Then, the control architecture of distributed MEMS designed with multi-agent technology is presented. The system model, structure of micro electromechanical agent, and behavior decision are expressed in formal approach. An algorithm is developed for the controlling the behavior decision and production in distributed real-time MEMS. And a prototype system is realized based on the algorithm.