声表面波器件薄膜电极脱落的电子探针分析

Analysis of Thin-film Pole Separation of SAW Element with EPMA

摘要: 电子探针显微分析法(EPMA)能把试样微区形貌分析与微区成分分析有机地结合起来。利用这一特点,文中对Au/Cr/Bi12GeO20声表面波器件作了显微分析研究,探明了薄膜电极脱落发生在Cr膜与Bi12GeO20基片的界面上。由于Cr膜与基片间是弱的简单附着机制,并且Cr膜承受着强烈的内应力,最终导致薄膜电极脱落。

Abstract: Based on microarea topograph and microarea composition with EPMA, an series of Au/Cr/Bi12GeO20 SAW elements is micro-analyzed.It is proved that the thin-film pole separation appears in the boundary plane between Cr-film and Bi12GeO20-Substrate.This boundary connection is a simple weak adhesion and the Cr-film is forced intensely by a kind of internal-stress.As a result, the thin-film pole separates from the substrate.