-
In recent decades, CsI(Tl) scintillators have been widely used as the converter for X-ray imaging detector because of its high scintillation efficiency, proper emission wavelength matching CCD cameras, and its ability to form micro-columnar morphology at vacuum deposition. CsI(Tl) scintillator tends to grow on substrates in such a way that most of the grains in the film develop a texture, that is, most grains are oriented so that the grains are almost perpendicular to the film-substrate interface.
Since reported in 1969, the micro-columnar structure of deposited CsI(Tl) film has been widely studied, such as the influence of deposition conditions vapor pressure, substrate temperature[1-2], deposition rate[3] and annealing process[1-3] on the columnar morphology, and light output and imaging quality of CsI(Tl) films. The patterned substrate[4-5] and coating reflective layer[6] were employed to control the micro columns, and then improve the light output and the spatial resolution of CsI(Tl) scintillation film. Additionally, the CsI(Tl) layer were coupled with amorphous silicon photodiode arrays to detect the charged particles[7]. The crystalline properties of CsI(Tl) films deposited on LiF single crystals with (100) cleavage plane and its dewetting behavior have been studied and found (110) and (112) preferred orientations different to that of CsI powder[8-10].
In this work, CsI(Tl) scintillator films were fabricated by thermal evaporation method on monocrystalline Si and polycrystalline Pt/Si substrates. These films with different thickness were prepared under the same process conditions. The surface morphology of film was observed by FEI-SEM. The films with different thickness showed different crystalline properties according to their X-ray diffraction (XRD) patterns.
-
摘要: 掺铊碘化铯(CsI(Tl))闪烁薄膜因其具有连续致密的微晶柱结构而被广泛应用。该文采用真空热蒸镀方法在单晶硅(Si)衬底和多晶铂硅(Pt/Si)衬底上制备不同厚度的CsI(Tl)薄膜,研究不同衬底上薄膜厚度增加过程中微晶柱结构中出现的裂纹形貌。不同厚度的CsI(Tl)薄膜制备工艺条件相同。通过X射线衍射图谱(XRD)和扫描电子显微照片(SEM)表征CsI(Tl)薄膜的结晶质量和微晶柱结构形貌,研究不同衬底上CsI(Tl)薄膜的微晶柱结构在生长过程中发生的变化。建立CsI(Tl)薄膜的微结构模型研究单晶薄膜中晶面间距对薄膜微晶柱结构的影响。Abstract: Thallium doped cesium iodide (CsI(Tl)) scintillator films are widely used for their dense micro-columnar structure. In this work, CsI(Tl) films with different thickness were fabricated on monocrystalline silicon substrate and polycrystalline Pt/Si substrate by the thermal deposition method. These scintillator films with different thickness were manufactured under the same process conditions and prepared for experiments. The microcrystalline column structures were different during the thickness of films. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to investigate the crystal quality and microcrystalline column morphology. The microstructure model of the CsI(Tl) film was built to illustrate the influence of the interplanar spacing on microcrystalline column structures of the monocrystalline film.
-
Key words:
- CsI(Tl) scintillator film /
- interplanar spacing /
- microcrystalline column /
- SEM /
- XRD
-
[1] CHA B K, SHIN J H, BAE J H, et al. Scintillation characteristics and imaging performance of CsI:Tl thin films for X-ray imaging applications[J]. Nuclear Instruments & Methods in Physics Research A, 2009, 604:224-228. http://cn.bing.com/academic/profile?id=2007067570&encoded=0&v=paper_preview&mkt=zh-cn [2] CHA B K, BAE J H, LEE C, et al. The sensitivity and spatial resolution dependence on the microstructures of CsI:Tl scintillation layer for X-ray imaging detectors[J]. Nuclear Instruments & Methods in Physics Research A, 2011, 633:S297-S299. http://cn.bing.com/academic/profile?id=2022668600&encoded=0&v=paper_preview&mkt=zh-cn [3] FUJIEDA I, CHO G, DREWERY J, et al. X-ray and charged particle detection with CsI(Tl) layer coupled to a-Si:H photodiode layers[J]. IEEE Transactions on Nuclear Science, 1991, 38(2):255-262. doi: 10.1109/23.289306 [4] JING T, GOODMAN C A, DREWERY J, et al. Amorphous silicon pixel layers with cesium iodide converters for medical radiography[J]. IEEE Transactions on Nuclear Science, 1994, 41(4):903-909. doi: 10.1109/23.322829 [5] JING T, CHO G, DREWERY J, et al. Enhanced columnar structure in CsI layer by substrate patterning[J]. IEEE Transactions on Nuclear Science, 1992, 39(5):1195-1198. doi: 10.1109/23.173177 [6] NAGARKAR V V, GUPTA T K, MILLER S R, et al. Structured CsI(Tl) scintillators for X-ray imaging applications[J]. IEEE Transactions on Nuclear Science, 1998, 45(3):492-496. doi: 10.1109/23.682433 [7] JING T, GOODMAN C A, DREWERY J, et al. Detection of charged particles and X-rays by scintillator layers coupled to amorphous silicon photodiode arrays[J]. Nuclear Instruments & Methods in Physics Research A, 1996, 368:757-764. http://cn.bing.com/academic/profile?id=2060508258&encoded=0&v=paper_preview&mkt=zh-cn [8] FEDOROV A, LEBEDINSKY A, MATEYCHENKO P. Dewetting behavior of CsI layers on LiF substrate[J]. Journal of Crystal Growth, 2011, 318:595-598. doi: 10.1016/j.jcrysgro.2010.10.049 [9] ANANENKO A, FEDOROV A, MATEYCHENKO P, et al. Structure and scintillation properties of CsI(Tl) epitaxial layers[J]. Applied Surface Science, 2004, 236:186-191. doi: 10.1016/j.apsusc.2004.04.015 [10] ANANENKO A, FEDOROV A, LEBEDINSKY A, et al. Structural dependence of CsI(Tl) film scintillation properties[J]. Semicon Phys, Quantum Electron Optoelectron, 2004, 7(3):297-300. http://cn.bing.com/academic/profile?id=2470384646&encoded=0&v=paper_preview&mkt=zh-cn [11] THOMPSON C V. Grain growth in thin films[J]. Annual Review of Materials Research, 1990, 20:245-268. doi: 10.1146/annurev.ms.20.080190.001333 [12] THOMPSON C V, CAREL R. Texture development in polycrystalline thin films[J]. Material Science and Engineering:B, 1995, 32:211-219. doi: 10.1016/0921-5107(95)03011-5