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摩尔定律已经逼近物理极限,未来的发展趋势是将延续摩尔定律和超越摩尔定律结合起来,实现更高级的系统——微系统[1-4]。
微系统是一种利用微纳加工技术在微纳尺度上制备而成的电子系统。它涵盖了微电子、光电子、MEMS等多种电子元器件,同时涉及架构、软件以及算法等多种要素,具有体积小、高度集成等特点[5-8]。
本文设计了一种新型三维集成射频模拟数字一体化微系统,变频部分采用直接变频架构,从方案和实现两方面详细介绍了微系统的架构、设计、工艺和验证,重点介绍了一种全新的散热方案。
New Three-Dimensional Integrated RF-Analog-Digital Microsystem
doi: 10.12178/1001-0548.2022236
- Received Date: 2022-07-15
- Rev Recd Date: 2022-10-03
- Available Online: 2023-05-26
- Publish Date: 2023-05-28
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Key words:
- integration /
- microsystem /
- RF analog digital /
- three-dimensional integration
Abstract: Recent years, microsystem has become one of the hot issues in electronic information field. This paper introduces a new three-dimensional integrated radio frequency (RF)-analog-digital microsystem. The architecture, process and verification of the microsystem are described in detail from the aspects of scheme and implementation. The traditional RF frontend is 250 mm × 120 mm size, while the microsystem is only 37 mm × 37 mm size, reducing its area by 95%. Based on the integrated ceramic three-dimensional package architecture, the microsystem integrates a variety of bare chips and passive devices to realize the electrical interconnection of internal signals. A new heat dissipation scheme is adopted to customize and develop a high thermal conductivity composite heat sink cover plate. The thermal conductivity is increased from 15 W/(m·K) to 150 W/(m·K) above. The thermal conductive silica gel is filled between the FC bare chip and the cover plate to form a new heat dissipation route and achieve efficient heat dissipation.
Citation: | ZHANG Junzhi, YANG Jin, ZHANG Qiang, CAO Xuesong, ZHU Jian. New Three-Dimensional Integrated RF-Analog-Digital Microsystem[J]. Journal of University of Electronic Science and Technology of China, 2023, 52(3): 372-378. doi: 10.12178/1001-0548.2022236 |