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DU Xiao-song, XIAO Hua, JIANG Ya-dong. Development of MEMS Gas-Phase Preconcentrators[J]. Journal of University of Electronic Science and Technology of China, 2009, 38(5): 597-602. doi: 10.3969/j.issn.1001-0548.2009.05.015
Citation: DU Xiao-song, XIAO Hua, JIANG Ya-dong. Development of MEMS Gas-Phase Preconcentrators[J]. Journal of University of Electronic Science and Technology of China, 2009, 38(5): 597-602. doi: 10.3969/j.issn.1001-0548.2009.05.015
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Development of MEMS Gas-Phase Preconcentrators

doi: 10.3969/j.issn.1001-0548.2009.05.015
  • 1.

    School of Optoelectronic Information,University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China Chengdu 610054

  • Received Date: 2009-04-22
  • Publish Date: 2009-10-15
  • The preconcentrator is a front-end sampling and concentrating device that can significantly improves the detection limit of a microanalytical system. The micromachined preconcentrators with reduced thermal mass can raise the temperature much faster at lower power compared with the conventional desorption tubes, thus realizing a much higher concentration factor. In this paper, the state-of-the-art of the microfabricated preconcentrators are systematically summarized, with especial emphasise on the structure of the micro-preconcentrators from the point of view of adsorption area, gas flux, temperature rising, fluid channel design, and so on. The principles of phased heater array and preconcentrator with integrated micro-valves are also introduced.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Development of MEMS Gas-Phase Preconcentrators

doi: 10.3969/j.issn.1001-0548.2009.05.015
  • 1. School of Optoelectronic Information,University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China Chengdu 610054
  • Received Date: 2009-04-22
  • Publish Date: 2009-10-15

Abstract: The preconcentrator is a front-end sampling and concentrating device that can significantly improves the detection limit of a microanalytical system. The micromachined preconcentrators with reduced thermal mass can raise the temperature much faster at lower power compared with the conventional desorption tubes, thus realizing a much higher concentration factor. In this paper, the state-of-the-art of the microfabricated preconcentrators are systematically summarized, with especial emphasise on the structure of the micro-preconcentrators from the point of view of adsorption area, gas flux, temperature rising, fluid channel design, and so on. The principles of phased heater array and preconcentrator with integrated micro-valves are also introduced.

DU Xiao-song, XIAO Hua, JIANG Ya-dong. Development of MEMS Gas-Phase Preconcentrators[J]. Journal of University of Electronic Science and Technology of China, 2009, 38(5): 597-602. doi: 10.3969/j.issn.1001-0548.2009.05.015
Citation: DU Xiao-song, XIAO Hua, JIANG Ya-dong. Development of MEMS Gas-Phase Preconcentrators[J]. Journal of University of Electronic Science and Technology of China, 2009, 38(5): 597-602. doi: 10.3969/j.issn.1001-0548.2009.05.015
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