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ZHU Ying-min, JIA Jian-yuan, FAN Kang-qi. Study on the Air Damp of the Plate Movement in the MEMS Devices[J]. Journal of University of Electronic Science and Technology of China, 2007, 36(5): 965-968.
Citation: ZHU Ying-min, JIA Jian-yuan, FAN Kang-qi. Study on the Air Damp of the Plate Movement in the MEMS Devices[J]. Journal of University of Electronic Science and Technology of China, 2007, 36(5): 965-968.
shu

Study on the Air Damp of the Plate Movement in the MEMS Devices

  • 1.

    School of Mechanical Electrical Engineering,Xidian University Xi'an 710071

  • Received Date: 2006-02-05
  • Publish Date: 2007-10-15
  • The gas damp of the two translational moving parallel flats in Micro Electro-Mechanical System (MEMS) devices is analyzed. The analytical formulae of the gas damp force and damp coefficient of the parallel flats in the MEMS devices are derived by expanding the vertical motion equations of the flat in Fourier series. The result shows that the gas damp coefficient of the translational moving parallel flats is close to be inversely proportional to the third power of the gas film thickness. The gas damp in a micro acceleration switch is simulated. The results show that the gas damp changes according to the switch working state. The effect of the gas damp coefficient upon the switch performance is also studied.
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Study on the Air Damp of the Plate Movement in the MEMS Devices

  • 1. School of Mechanical Electrical Engineering,Xidian University Xi'an 710071
  • Received Date: 2006-02-05
  • Publish Date: 2007-10-15

Abstract: The gas damp of the two translational moving parallel flats in Micro Electro-Mechanical System (MEMS) devices is analyzed. The analytical formulae of the gas damp force and damp coefficient of the parallel flats in the MEMS devices are derived by expanding the vertical motion equations of the flat in Fourier series. The result shows that the gas damp coefficient of the translational moving parallel flats is close to be inversely proportional to the third power of the gas film thickness. The gas damp in a micro acceleration switch is simulated. The results show that the gas damp changes according to the switch working state. The effect of the gas damp coefficient upon the switch performance is also studied.

ZHU Ying-min, JIA Jian-yuan, FAN Kang-qi. Study on the Air Damp of the Plate Movement in the MEMS Devices[J]. Journal of University of Electronic Science and Technology of China, 2007, 36(5): 965-968.
Citation: ZHU Ying-min, JIA Jian-yuan, FAN Kang-qi. Study on the Air Damp of the Plate Movement in the MEMS Devices[J]. Journal of University of Electronic Science and Technology of China, 2007, 36(5): 965-968.
shu

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