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Article Navigation >  Journal of University of Electronic Science and Technology of China  > 1997  >  26(4): 387-390

Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Citation: Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
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Humidity Sensors Using α-Al2O3 Capacitance Thin Films

  • 1.

    Centen for Materials analysis,Center for Opticelectronic Records,UEST of China Chengdu 610054

  • Received Date: 1997-01-03
  • Rev Recd Date: 1997-03-11
  • Publish Date: 1997-08-15
  • After reviewing the characteristics of the alumina film capactiance humidity sensors,a new alumina film humidity sensor employing α Alumina film is suggested.The fabrication method and primary characteristics are described in this paper.Finally,those problems that have not been solved are discussed.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Humidity Sensors Using α-Al2O3 Capacitance Thin Films

  • 1. Centen for Materials analysis,Center for Opticelectronic Records,UEST of China Chengdu 610054
  • Received Date: 1997-01-03
  • Rev Recd Date: 1997-03-11
  • Publish Date: 1997-08-15

Abstract: After reviewing the characteristics of the alumina film capactiance humidity sensors,a new alumina film humidity sensor employing α Alumina film is suggested.The fabrication method and primary characteristics are described in this paper.Finally,those problems that have not been solved are discussed.

Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Citation: Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
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