Fast Prototyping of Two-Dimensional Nanoelectromechanical Resonators

In this work, we report a multifunctional system for facile fabrication of 2D nanodevices. The system has advantages of achieving both the transfer process and electrodes deposition all using the same setup, and thus can efficiently prototyping nanodevices. Using this multifunctional fabrication system, we successfully fabricate WSe₂ resonators and then measure the device performance. Our work shows great potential in realizing resonant 2D devices using this multifunctional nanodevice fabrication system.