3D Symmetric Computation Algorithm with Finite Element Method for Electron Optic System

In this paper, 3D symmetric computation algorithm with finite element method for electron optic system is presented. The symmetric boundary conditions for the electric field and the electron trajectories are derived in detail. The algorithm is implemented in electron optics simulator (EOS). The Comparison of symmetric computation and full computation shows that the symmetric computation can reduce the computational time and the computer memory effectively without decreasing the computational accuracy.