Progress in Research on NO₂ Gas Sensing Properties of ZnO Micro/Nanoporous Array Thin Films Under UV Irradiation

Zinc oxide (ZnO) mocro/nanoporous array thin film-based gas sensors were prepared by the organic template-based solution dipping——monolithic transfer strategy. The research focuses on nitrogen dioxide (NO₂) gas sensing properties of different aperture sizes of ZnO micro/nanoporous array thin films under UV irradiation with different intensity. The results show that ZnO micro/nanoporous array thin film can be obtained by 500 nm polystyrene (PS) as template, the film-based sensor has high sensitivity and fast response and recovery time when the intensity of UV light is 0.35 mW/cm³. This kind of sensor shows good anti-disturbance to the other gases, such as acetone, formaldehyde, H₂S, SO₂, and CH₄.