YANG Jian-jun, LI Jun-jian, ZHANG You-run, WANG Jun, LIN Hui, RAO Hai-bo, JIANG Quan, CHENG Jian-bo. Crafts in ITO Glass for OLED Used[J]. Journal of University of Electronic Science and Technology of China, 2006, 35(2): 261-263.
Citation: YANG Jian-jun, LI Jun-jian, ZHANG You-run, WANG Jun, LIN Hui, RAO Hai-bo, JIANG Quan, CHENG Jian-bo. Crafts in ITO Glass for OLED Used[J]. Journal of University of Electronic Science and Technology of China, 2006, 35(2): 261-263.
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Crafts in ITO Glass for OLED Used

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  • Low resistivity Indium Tin Oxide (ITO) films were deposited by DC magnetron sputtering using ITO targets. Films deposited at substrate temperature of 250℃ with 200 W input DC power, in an oxygen/argon atmosphere, argon flow was kept at about 16 sccm and the oxygen flow was less than 1sccm, respectively. Annealing of the ITO films without oxygen for 1 h was necessary for achieving low resistivities. Low resistivity (80%) in visible region were found to occur at a high annealing temperature about 350℃.
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