Synthesis of CNTs Film and Influence of Treatment of CNTs Film on Field Emission Properties

In this paper, NiCr alloy was vaporized on the silicon in vacuum as the catalyzer and synthesized Carbon NanoTubes (CNTs) film using chemical vapour deposition. We treated CNTs film with H2 plasma and measured the field emission characteristic of CNTs film. CNTs film's turn on fields was 1~1.2 V/μm and had obviously reduced compared with that not treated. The most field emission current was increased 34 μA from 12.3 μA after annealed.