Study on the Modeling Method of Reduced-Order Model for MEMS Devices

Reduced-order models of MEMS devices are the key step of system-level simulation for MEMS. It is an effective way that reduced-order models of MEMS devices are established based on linear orthogonal mode shapes. The differential equations of dynamic reduced-order models are deduced. According to the law of energy conservation, every energy domain of the system can be represented by generalizing coordinates, and the coupled differential equations can be solved by superposition of linear orthogonal mode shapes. Consequently, a set of differential equations representing dynamic characteristics of MEMS devices can be expressed. As a result, the system-level simulation can be performed by existing software of circuit simulation.