Manufacture of Micro Sensor of Acceleration in Fuse System

In this paper the method of the design and the manufacture for the high g micro sensor array of the acceleration for the use of the fuse system are presented systematically, synthetically. It is applied the different method of the design and the technique for measuring the different value of the acceleration, and had the different sensor array in the manufacture of the micro sensor array of the acceleration. It is used the 3-D technique union of the 2-D technique of the integrated circuit. This sample meet the demand which is based upon this paper for the application.