Research on Methods of Calculating Capacitance in VLSI
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Graphical Abstract
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Abstract
In this paper, the methods to calculate the capacitance coefficients in VLSI circuits are discussed, which are classified as formula method and numerical method. The latter includes the finite difference method (FDM), the finite element method (FEM), the boundary element method (BEM) and the Green(s Function method, etc. The theories, advantages and disadvantages of the methods are analyzed, respectively.
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