Li Xuemin, Lu Guowei, Zhou Liushu. A Novel Method for Refractive Microlens Array Fabrication[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(3): 294-296.
Citation:
Li Xuemin, Lu Guowei, Zhou Liushu. A Novel Method for Refractive Microlens Array Fabrication[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(3): 294-296.
Li Xuemin, Lu Guowei, Zhou Liushu. A Novel Method for Refractive Microlens Array Fabrication[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(3): 294-296.
Citation:
Li Xuemin, Lu Guowei, Zhou Liushu. A Novel Method for Refractive Microlens Array Fabrication[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(3): 294-296.
A Novel Method for Refractive Microlens Array Fabrication
In this paper, a novel method for refractive microlens array fabrication is introduced. Its main idea is similar to that of gray-scale mask method. The mask needed is made through laser directwriting technique. Exposed only once, the profile of refractive microlens array is formed on the photoresist. The figures of the test are presented for the microlens array obtained.
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