Liu Hong, Yao Suying, Qu Hongwei, Zhang Shengcai, Zhang Weixin, Mao Ganru. Application of TMAH Solutions in Manufacturing of Pressure Sensor[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(6): 609-612.
Citation: Liu Hong, Yao Suying, Qu Hongwei, Zhang Shengcai, Zhang Weixin, Mao Ganru. Application of TMAH Solutions in Manufacturing of Pressure Sensor[J]. Journal of University of Electronic Science and Technology of China, 2000, 29(6): 609-612.
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Application of TMAH Solutions in Manufacturing of Pressure Sensor

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  • In this paper, etching characteristics of TMAH solutions is introduced. Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed. Satisying process condition and experimental results are obtained through experiments.
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