Analysis of Thin-film Pole Separation of SAW Element with EPMA

Based on microarea topograph and microarea composition with EPMA, an series of Au/Cr/Bi12GeO20 SAW elements is micro-analyzed.It is proved that the thin-film pole separation appears in the boundary plane between Cr-film and Bi12GeO20-Substrate.This boundary connection is a simple weak adhesion and the Cr-film is forced intensely by a kind of internal-stress.As a result, the thin-film pole separates from the substrate.