Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Citation:
Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Citation:
Shi Qing, Zhang Xiaowei, Jin Maochang. Humidity Sensors Using α-Al2O3 Capacitance Thin Films[J]. Journal of University of Electronic Science and Technology of China, 1997, 26(4): 387-390.
Humidity Sensors Using α-Al2O3 Capacitance Thin Films
After reviewing the characteristics of the alumina film capactiance humidity sensors,a new alumina film humidity sensor employing α Alumina film is suggested.The fabrication method and primary characteristics are described in this paper.Finally,those problems that have not been solved are discussed.
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