Abstract: Radio frequency (RF) stealth and radar stealth are two approaches to decrease threatened area and probability RF stealth and radar stealth are two approaches to decrease threatened area and probability of intercept, which are the key factors of stealthy penetration combat. It is essential to efficiently and objectively evaluate performances of the RF stealth and radar stealth efficiency of RF system of aircraft for special combat missions. In this article, the research progress of parameter characterization and evaluation methods for stealth capabilities are introduced and reviewed, and the technical features and drawbacks of these methods are also summarized. Several advices of stealth characterization for RF systems are proposed, which may be beneficial to evaluate stealthy performances of aircraft in actual combat environment.