紫外传感贴片的叉指结构仿真优化

Simulation and Optimization of the Interdigital Structure of a UV Sensor Patch

  • 摘要: 利用COMSOL Multiphysics 仿真软件建立了含叉指电极结构的紫外传感贴片三维模型,并对其进行了相关电特性研究。为降低传感器初始电阻,便于后端电路的测量开发,利用控制变量法,基于叉指指宽、间距、厚度等结构参数设置了多个不同的仿真模型。在AC/DC模块下的电流物理场接口下,选择稳态研究,结果表明,不同的结构参数将对电极和传感器的电场分布和初始电阻产生影响。通过对比分析发现,叉指电极的指宽为0.6 mm,间距为0.4 mm,厚度为5 μm时,初始电阻最小。此外,还设计了新型环状叉指电极结构,初步探究了其相关电学特性。研究发现该结构的初始电阻值与优化后的矩形叉指处于同一量级,对相关实验实践具有很好的指导意义。

     

    Abstract: In this paper, the COMSOL Multiphysics simulation software is used to establish a three-dimensional model of a UV sensor patch with an interdigital electrode structure, and its electrical characteristics are studied. In order to reduce the initial resistance of the sensor and facilitate the measurement of the back-end circuit, a number of different simulation models are set up based on the structural parameters such as the width, spacing, and thickness of the interdigitated fingers by using the control variable method. Under the current physics interface in the AC/DC module, a steady state study is selected, and the results show that different structural parameters will have an impact on the electric field distribution and initial resistance of the electrodes and sensors. Through observation and analysis, it is found that the finger width of the interdigital electrode is 0.6 mm, the spacing is 0.4 mm, and the initial resistance is the smallest when the thickness is 5 μm. In addition, a new annular interdigitated electrode structure was designed, and its related electrical properties were initially explored. It is found that its initial resistance value is in the same order of magnitude as the optimized rectangular interdigital electrode, which has a good guiding significance for relevant practical experiments.

     

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