多芯粒2.5D/3D集成技术研究与应用现状

Current research and applications of 2.5D/3D integration technology for Multi-Chiplets

  • 摘要: 面向高性能计算机、人工智能、无人系统对电子芯片高性能、高集成度的需求,以2.5D、3D集成技术为代表的先进封装集成技术,不仅打破了当前集成芯片良率降低、成本骤升的困境,也是实现多种类型、多种材质、多种功能芯粒集成的重要手段。本文对多芯粒2.5D、3D集成方案研究现状与技术水平进行总结分析,包括大尺寸中介层2.5D技术、低互连节距3D堆叠互连技术、玻璃基集成技术等。并总结了不同集成方案技术的主要发展方向与亟待攻克的技术难点。在此基础上,进一步归纳了多芯粒2.5D、3D集成技术在数字、光电、微电子机械等集成芯片与器件领域的应用,分析了多芯粒2.5D、3D封装集成技术未来发展与应用方向,为微小型多功能一体化集成芯片与系统的实现提供发展思路。

     

    Abstract: To address the demand for high-performance and high-integrity electronic chips in high-performance computing, artificial intelligence, and unmanned systems, advanced packaging and integration technologies, represented by 2.5D and 3D integration of multi-chiplets, not only overcome the challenges of decreased yield and increased costs in current integrated chips but also serve as a crucial means for integrating multiple types and functions of chiplets. This paper summarizes the current state of research and technological advancements in 2.5D and 3D integration of multi-chiplets, including 2.5D integration using large-scale interposers, 3D stacking integration with high density, and glass-based integration. Based on this review, the major development directions and key technical challenges of 2.5D and 3D integration are explored. Next, the applications of 2.5D and 3D integration in digital, optoelectronic, and microelectromechanical integrated chips and devices are reviewed. Furthermore, the development and application directions of multi-chiplet integration technologies are summarized, providing developmental insights for the realization of miniaturized, multifunctional, integrated chips and systems.

     

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