Abstract: Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.