二维纳米机电谐振器高效制备

Fast Prototyping of Two-Dimensional Nanoelectromechanical Resonators

  • 摘要: 设计并实现了一种二维纳米器件多功能制备系统,该系统不仅能够完成二维材料的高效转移,还能够实现金属电极的准确淀积,从而实现二维器件的高效、一体化制备。利用该系统,成功制备了基于二维半导体的纳米机电谐振器,并对器件进行了机电谐振幅频特性的测试。研究结果表明,设计的二维纳米器件多功能制备系统在纳米谐振器制备与研究中极具潜力。

     

    Abstract: In this work, we report a multifunctional system for facile fabrication of 2D nanodevices. The system has advantages of achieving both the transfer process and electrodes deposition all using the same setup, and thus can efficiently prototyping nanodevices. Using this multifunctional fabrication system, we successfully fabricate WSe2 resonators and then measure the device performance. Our work shows great potential in realizing resonant 2D devices using this multifunctional nanodevice fabrication system.

     

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