±16 g三质量块三轴MEMS电容式加速度计的设计

Design of ±16 g Three-Mass Three-Axis MEMS Capacitive Accelerometer

  • 摘要: 微电子机械系统(MEMS)惯性传感器(如加速计、陀螺仪)具有高性能、低功耗、低成本、集成度高、可靠性高、体积小等特点。但MEMS传感器交叉串扰仍较大,影响了加速度的测量。该文设计了一个量程为±16 g的三质量块三轴MEMS电容式加速度计结构,通过对所设计的结构进行静力学分析和模态分析,保证加速度计良好的抗过载能力。仿真结果表明,该结构实现了模态分离避免了模态干扰,且交叉灵敏度均小于0.3%,有效地降低了交叉串扰。

     

    Abstract: Micro-Electro-Mechanical system (MEMS) inertial sensors (such as accelerometers, gyroscopes) have the characteristics of high performance, low power consumption, low cost, high integration, high reliability, and small size. Cross-talk is a major issue in designing MEMS accelerator, which greatly affects the measurement of acceleration in the sensitive direction. In this paper, we propose a three-mass three-axis MEMS capacitive accelerometer structure with a range of ±16 g for reducing the problem. The static and modal analysis of the structure is made to ensure good anti-overload capability of the accelerometer. The simulation results show that the structure achieves modal separation and avoids modal interference, and the cross-sensitivity is less than 0.3%, which effectively reduces the cross-talk.

     

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