紫外光驱动微纳结构薄膜的气敏特性研究

Progress in Research on NO₂ Gas Sensing Properties of ZnO Micro/Nanoporous Array Thin Films Under UV Irradiation

摘要: 采用基于有机模板的溶液浸渍-无损转移法制备ZnO微纳多孔有序薄膜，研究了在不同紫外光强度照射下和不同尺寸孔径的ZnO微纳多孔有序薄膜对NO₂气敏性能的影响。结果表明，以500 nm聚苯乙烯（PS）球为模板制备的ZnO微纳多孔薄膜传感器，在0.35 mW/cm³紫外光照射下具有较高的灵敏度、较快的响应和恢复时间。随着紫外光强度的增强和孔径尺寸的增大，ZnO微纳多孔薄膜传感器的灵敏度降低；且在紫外光照射下ZnO微纳有序多孔薄膜对乙醇、甲醛、H₂S、SO₂和CH₄等气体具有很好的选择性。

Abstract: Zinc oxide (ZnO) mocro/nanoporous array thin film-based gas sensors were prepared by the organic template-based solution dipping——monolithic transfer strategy. The research focuses on nitrogen dioxide (NO₂) gas sensing properties of different aperture sizes of ZnO micro/nanoporous array thin films under UV irradiation with different intensity. The results show that ZnO micro/nanoporous array thin film can be obtained by 500 nm polystyrene (PS) as template, the film-based sensor has high sensitivity and fast response and recovery time when the intensity of UV light is 0.35 mW/cm³. This kind of sensor shows good anti-disturbance to the other gases, such as acetone, formaldehyde, H₂S, SO₂, and CH₄.