Abstract:
To improve the sensing sensitivity of electronic skin (e-skin), a capacitive flexible tactile sensor based on spherical surface plate is proposed in this paper. The structural characteristics and fabrication process of the sensor was illustrated, meanwhile, the tactile sensing mechanism is also presented based on the combine of theoretical calculation and ANSYS finite element simulation. The sensitivity of the capacitive flexible tactile can be cooperatively improved based on the spatial arrangement of spherical surface plate and differential structure. Furthermore, the signal acquisition and processing system of the capacitive tactile sensor is constructed based on the high performance capacitive digital converter AD7147-1 and STM32 microprocessor, and the characteristic test and the application of the proposed device are also conducted. The experiment results show that the high sensitivity tactile sensing of normal force and tangential force and high stability can be obtained by using the capacitive tactile sensor with the spherical surface plate with a fast response time of 70 ms, and the feasibility of the capacitive tactile sensor used as electric skin is further demonstrated.