LIANG Yachun, DENG Qingyang, JIAO Chenyin, XU Bo, ZHU Jiankai, XIAO Fei, XIA Juan, WANG Zenghui. Fast Prototyping and Characterization of MoS2 Inverter Enabled by Dry Transfer[J]. Journal of University of Electronic Science and Technology of China, 2023, 52(3): 438-443. DOI: 10.12178/1001-0548.2022147
Citation: LIANG Yachun, DENG Qingyang, JIAO Chenyin, XU Bo, ZHU Jiankai, XIAO Fei, XIA Juan, WANG Zenghui. Fast Prototyping and Characterization of MoS2 Inverter Enabled by Dry Transfer[J]. Journal of University of Electronic Science and Technology of China, 2023, 52(3): 438-443. DOI: 10.12178/1001-0548.2022147

Fast Prototyping and Characterization of MoS2 Inverter Enabled by Dry Transfer

  • In this work, we report the fabrication and characterization of an MoS2 inverter by a dry transfer method, where the inverter consists of an MoS2 transistor and an MoS2 resistor connected in series with graphene flakes serving as electrodes. To improve the electrical performance of the MoS2 transistor and invertor, we utilize thermal evaporation (Au) through a stencil mask to improve the contact quality between the graphene electrodes and metal electrodes on the substrate. Upon such enhancement, we find that the MoS2 transistor exhibits an ION/IOFF > 105; the MoS2 inverter shows a typical logic-conversion feature with voltage gain > 6. Our work demonstratesthat the dry transfer technique has great potential in the preparation and application of two-dimensional transistors, inverters and logic circuits.
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