Design of ±16 g Three-Mass Three-Axis MEMS Capacitive Accelerometer

Micro-Electro-Mechanical system (MEMS) inertial sensors (such as accelerometers, gyroscopes) have the characteristics of high performance, low power consumption, low cost, high integration, high reliability, and small size. Cross-talk is a major issue in designing MEMS accelerator, which greatly affects the measurement of acceleration in the sensitive direction. In this paper, we propose a three-mass three-axis MEMS capacitive accelerometer structure with a range of ±16 g for reducing the problem. The static and modal analysis of the structure is made to ensure good anti-overload capability of the accelerometer. The simulation results show that the structure achieves modal separation and avoids modal interference, and the cross-sensitivity is less than 0.3%, which effectively reduces the cross-talk.