Dynamics Modeling and Synchronization Control of Clamped-Clamped Beam MEM Silicon Resonator

Non-linear factors such as periodic oscillation, bifurcation and chaos under the high-energy output of micro-electro-mechanical (MEM) silicon resonators will limit the accuracy of oscillation frequency control. This paper proposes an output feedback synchronous control method for clamped-clamped beam micro-electro-mechanical silicon resonators and improves its oscillation frequency control performance through oscillator synchronization. First, the system structure and nonlinear characteristics of the MEM silicon resonator with clamped-clamped beam MEM silicon resonators are analyzed and a dynamic model that fully considers the nonlinear characteristics of the system is established. On this basis, an output feedback synchronization controller based on synchronization error is designed, it can realize the synchronous control of multi-MEM silicon resonators and make the corresponding synchronous error asymptotically converge to zero. Finally, the effectiveness of the proposed method is proved by simulation experiments.