Study on the Air Damp of the Plate Movement in the MEMS Devices

ISSN 1001-0548
CN 51-1207/TN
CODEN DKDAEM
Ei Compendex 收录期刊
中文核心期刊
信息通信领域T1级期刊

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ZHU Ying-min, JIA Jian-yuan, FAN Kan