Chen Yuxiao, Wen Guiyin, Liu Changxiao. Research on Dynamic Behavior of Micromachined Capacitive AccelerometerJ. Journal of University of Electronic Science and Technology of China, 2002, 31(5): 497-501.
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Citation:
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Chen Yuxiao, Wen Guiyin, Liu Changxiao. Research on Dynamic Behavior of Micromachined Capacitive AccelerometerJ. Journal of University of Electronic Science and Technology of China, 2002, 31(5): 497-501.
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Chen Yuxiao, Wen Guiyin, Liu Changxiao. Research on Dynamic Behavior of Micromachined Capacitive AccelerometerJ. Journal of University of
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